In-line RF Device Testing for Monitoring a
High Volume GaAs HBT Production Line
Cristian
Cismaru, Hal Banbrook, Peter J. Zampardi, Jing Li, James W. Penney, and Charles
McGuire*
Sun, Sun, Skyworks Solutions, Inc.
2427 Hillcrest Drive, Newbury Park, CA 91320 Phone:
*PrivaSys,
Inc.,
We demonstrate an RF test system calibration in GHz frequency domain that utilizes calibration structures integrated on wafer along with test devices. The success of this method allowed us to develop very accurate, fully automated, in-line RF test systems and methodology, including a hybrid-pi device model extraction, suitable for a high volume GaAs HBT manufacturing facility.
Keywords: GaAs, HBT, RF test, on-wafer calibration, hybrid-pi model